Theses most similar to Real-time spatial-phase-locked electron-beam lithography (Zhang, Feng, 1973-; 2005) read it
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Nanometer-precision electron-beam lithography with applications in integrated optics
Hastings, Jeffrey Todd, 1975- (2003)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Moon, Euclid E. (Euclid Eberle), 1965- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Three-dimensional nanofabrication of photonic crystals and polarization splitters and rotators
Qi, Minghao, 1973- (2005)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Multilevel interference lithography--fabricating sub-wavelength periodic nanostructures
Chang, Chih-Hao, 1980- (2008)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science
Design and fabrication of micro- and nano- dielectric structures for imaging and focusing at optical frequencies
Takahashi, Satosh (2011)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
A nanofabricated amplitude-division electron interferometer in a transmission electron microscope
Agarwal, Akshay (2016)
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science