Theses most similar to Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching (Sakai, Mark; 2005) read it
Design and qualification of an absolute thickness measuring machine
Kelly, Darcy K. (Darcy Kendal), 1980- (2004)
- Advisor: Nayfeh, Samir Ali, 1970-
- Department of Mechanical Engineering
- Advisors: George Barbastathis; Mark L. Schattenburg
- Department of Mechanical Engineering
X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication
Meinhold, Mitchell W., 1972- (2003)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Optical endpoint detection for the chemical mechanical polishing process
Nam, Jamie (Jamie Hyun), 1975- (2000)
- Advisor: Ernesto Blanco
- Department of Mechanical Engineering
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
Scanning probe microscopy with inherent disturbance suppression using micromechanical systems
Sparks, Andrew William, 1977- (2005)
- Advisors: Anne M. Mayes; Scott R. Manalis
- Department of Materials Science and Engineering
Dynamic nanometer alignment for nanofabrication and metrology
Moon, Euclid E. (Euclid Eberle), 1965- (1998)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling
AlSaeed, Abdulelah (Abdulelah Ibrahim) (2012)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering