Theses most similar to Scanning probe microscopy with inherent disturbance suppression using micromechanical systems (Sparks, Andrew William, 1977-; 2005) read it
A micromechanical biosensor with inherently differential readout
Savran, Cagri Abdullah, 1976- (2004)
- Advisor: Scott R. Manalis
- Department of Mechanical Engineering
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching
Sakai, Mark (2005)
- Advisors: David L. Carte; Harry L. Tuller
- Department of Materials Science and Engineering
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Yung, Chi-Fan, 1973- (1999)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: George Barbastathis
- Department of Mechanical Engineering
Piezoelectric micro-machined ultrasonic transducers for medical imaging
Smyth, Katherine Marie (2017)
- Advisors: Charles G. Sodini; Sang-Gook Kim
- Department of Mechanical Engineering
- Advisor: David L. Trumper
- Department of Mechanical Engineering
- Advisor: Dr. Kamal Youcef-Toumi
- Department of Mechanical Engineering