Theses most similar to Nanometer-precision electron-beam lithography with applications in integrated optics (Hastings, Jeffrey Todd, 1975-; 2003) read it
Development of X-ray lithography and nanofabrication techniques for III-V optical devices
Lim, Michael H. (Michael Hong) (2002)
- Advisor: Hemry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Multilevel interference lithography--fabricating sub-wavelength periodic nanostructures
Chang, Chih-Hao, 1980- (2008)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
Fabrication of critical-angle transmission gratings for high efficiency x-ray spectroscopy
Ahn, Minseung (2009)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
High speed electron-beam dose modulation by electrostatic quadra-deflection
Bernshteyn, Aleksandr, 1975- (1999)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
Fucetola, Corey Patrick (2013)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
A nanofabricated amplitude-division electron interferometer in a transmission electron microscope
Agarwal, Akshay (2016)
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science
Scalable creation of spin-photon interfaces for solid-state quantum information processing
Wan, Noel H. (Noel Heng Loon) (2017)
- Advisor: Dirk R. Englund
- Department of Electrical Engineering and Computer Science