Theses most similar to Pattern-placement-error detection for spatial-phase-locked e-beam lithography (SPLEBL) (Caramana, Cynthia L. (Cynthia Louise), 1978-; 2004) read it

  • Advisor: Charles G. Sodini
  • Department of Electrical Engineering and Computer Science
  • Advisor: Jonathan Allen
  • Department of Electrical Engineering and Computer Science
  • Advisor: James L. Kirtley, Jr., Richard D. Tabor
  • Department of Electrical Engineering and Computer Science
  • Advisors: David J. McGort; Jeffrey H. Lang
  • Department of Electrical Engineering and Computer Science
  • Advisor: Charles G. Sodini
  • Department of Electrical Engineering and Computer Science
  • Advisor: Franz X. Kärtner
  • Department of Electrical Engineering and Computer Science
  • Advisor: Franz X. Kärtner
  • Department of Electrical Engineering and Computer Science
  • Advisor: Gregory W. Wornell
  • Department of Electrical Engineering and Computer Science
  • Advisor: Jeffrey H. Shapiro
  • Department of Electrical Engineering and Computer Science
  • Advisor: Charles G. Sodini
  • Department of Electrical Engineering and Computer Science