Theses most similar to Study of plasma-surface kinetics and feature profile simulation of poly-silicon etching in Cl²/HBr plasma (Jin, Weidong, 1975-; 2003) read it

  • Advisors: David I. Pau; Samuel M. Allen
  • Department of Materials Science and Engineering
  • Advisor: William M. Deen
  • Department of Chemical Engineering
  • Advisor: Jackie Y. Ying
  • Department of Chemical Engineering
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  • Department of Nuclear Engineering
  • Advisors: Ballinger, Ronald George; Sidney Yip, Vasily V. Bulatov
  • Department of Nuclear Engineering