Theses most similar to X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication (Meinhold, Mitchell W., 1972-; 2003) read it
- Advisors: George Barbastathis; Mark L. Schattenburg
- Department of Mechanical Engineering
Design and fabrication of an electrically-activated photonic crystal nanocavity laser
Mattson, Eric (Eric Michael) (2005)
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Generation of high amplitude, variable-width pulses for device characterization
Bierbaum, Michele Marie (1995)
- Advisor: Peter L. Hagelstein
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Fabrication of optical-mode converters for efficient fiber-to-silicon-waveguide couplers
Barreto, Raúl E (2006)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Material selection and nanofabrication techniques for electronic photonic integrated circuits
Holzwarth, Charles W., III (Charles Willett) (2009)
- Advisors: Harry L. Tuller; Henry I. Smith
- Department of Materials Science and Engineering
Membrane technology for the fabrication of three-dimensional photonic crystals
Patel, Amil Ashok, 1979- (2010)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
Fucetola, Corey Patrick (2013)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering