Theses most similar to Development of novel alternative chemistry processes for dielectric etch applications (Karecki, Simon Martin; 2000) read it
Non-perfluorocompound chemistries for plasma etching of dielectrics
Tao, Benjamin A. (Benjamin Albert) (1996)
- Advisor: L. Rafael Reif
- Department of Materials Science and Engineering
Alternative chemistries for etching of silicon dioxide and silicon nitride
Karecki, Simon Martin (1996)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Non-perfluorocompound chemistries for dielectric etching applications
Pruette, Laura C. (Laura Catherine), 1974- (1998)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Labelle, Catherine B., 1972- (1999)
- Advisor: Karen K. Gleason
- Department of Chemical Engineering
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science