Theses most similar to Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions (Konkola, Paul Thomas, 1973-; 2003) read it
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
On the design of lithographic interferometers and their application
Walsh, Michael E. (Michael Edward), 1975- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Moon, Euclid E. (Euclid Eberle), 1965- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor:
- Department of Electrical Engineering and Computer Science
- Advisor: Mark Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Multilevel interference lithography--fabricating sub-wavelength periodic nanostructures
Chang, Chih-Hao, 1980- (2008)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
Design and fabrication of micro- and nano- dielectric structures for imaging and focusing at optical frequencies
Takahashi, Satosh (2011)
- Advisor: George Barbastathis
- Department of Mechanical Engineering