Theses most similar to Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy (Chen, Carl Gang, 1972-; 2003) read it
Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions
Konkola, Paul Thomas, 1973- (2003)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Moon, Euclid E. (Euclid Eberle), 1965- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor:
- Department of Electrical Engineering and Computer Science
- Advisor: Mark Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Dynamic nanometer alignment for nanofabrication and metrology
Moon, Euclid E. (Euclid Eberle), 1965- (1998)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Ultra-high precision scanning beam interference lithography and its application : spatial frequency multiplication
Zhao, Yong, 1980- (2008)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science
Design and fabrication of micro- and nano- dielectric structures for imaging and focusing at optical frequencies
Takahashi, Satosh (2011)
- Advisor: George Barbastathis
- Department of Mechanical Engineering