Theses most similar to Development of X-ray lithography and nanofabrication techniques for III-V optical devices (Lim, Michael H. (Michael Hong); 2002) read it
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- Department of Mechanical Engineering
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Nanometer-precision electron-beam lithography with applications in integrated optics
Hastings, Jeffrey Todd, 1975- (2003)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Arora, William Jay (2005)
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- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
High speed electron-beam dose modulation by electrostatic quadra-deflection
Bernshteyn, Aleksandr, 1975- (1999)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Distortion analysis on an improved mask technology for X-ray lithography
Pipe, Kevin P. (Kevin Patrick), 1976- (1999)
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Fabrication of high-throughput critical-angle X-ray transmission gratings for wavelength-dispersive spectroscopy
Bruccoleri, Alexander Robert (2013)
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- Department of Aeronautics and Astronautics