Theses most similar to Wafer bonding : mechanics-based models and experiments (Turner, Kevin Thomas, 1977-; 2004) read it
Modeling and fabrication of self-assembling micron-scale rollup structures
Cybulski, James Stanley, 1979- (2004)
- Advisor: Gang Chen
- Department of Mechanical Engineering
Analysis of DRIE uniformity for microelectromechanical systems
Hill, Tyrone F. (Tyrone Frank), 1980- (2004)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
- Advisor: S. Mark Spearing
- Department of Materials Science and Engineering
- Advisor: Nam P. Suh
- Department of Mechanical Engineering
Face-up chemical mechanical polishing : kinematics and material removal rate
Jammalamadaka, Arvind K. (Arvind Kumar), 1981- (2006)
- Advisors: Dr. Jung-Hoon Chun; Nannaji Saka
- Department of Mechanical Engineering
- Advisor: Edwin . Thomas
- Department of Materials Science and Engineering
Fabrication and material characterization of silver cantilevers via direct surface micromachining
Lam, Eric W. (Eric Wing-Jing) (2008)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: Sang-Gook Kim
- Department of Aeronautics and Astronautics
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering