Theses most similar to Silicon micromachined wafer-bonded valves (Huff, Michael Allan; 1993) read it
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- Department of Mechanical Engineering
Structural analysis of the MIT Micro Rocket Combustion Chamber
Noonan, Erin E. (Erin Elizabeth), 1978- (2002)
- Advisor: S. Mark Spearing
- Department of Aeronautics and Astronautics
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Through-substrate interconnects for 3-D integration and RF systems
Wu, Joyce H. (Joyce Hsia-Sing), 1974- (2006)
- Advisor: Jesús A. del Alamo
- Department of Electrical Engineering and Computer Science
- Advisor: Rosemary L. Smith
- Department of Mechanical Engineering
Thermally-actuated piezoresistively-sensed mechanical silicon oscillator
Sundaram, Subramania (2014)
- Advisor: Dana Weinstein
- Department of Electrical Engineering and Computer Science
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering
Evaporation from nanoporous membranes for high heat flux thermal management
Hanks, Daniel Frank (2016)
- Advisor: Evelyn N. Wang
- Department of Mechanical Engineering
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- Advisor: Evelyn N. Wang
- Department of Mechanical Engineering
- Advisors: Jeffrey H. Lang; Martin A. Schmidt
- Department of Mechanical Engineering