Theses most similar to Pattern dependencies in the plasma etching of polysilicon (Dalton, Timothy Joseph; 1994) read it

  • Advisor: Warren M. Rohsenow
  • Department of Mechanical Engineering
  • Advisor: Ben-Akiva, Moshe E
  • Department of Civil and Environmental Engineering
  • Advisor: Dimitris Bertsimas Pablo A. Parrilo
  • Department of Electrical Engineering and Computer Science
  • Advisor: Langer, Robert S
  • Department of Chemical Engineering
  • Advisor: Eugene A. Fitzgerald
  • Department of Materials Science and Engineering